US 4,902,605 : Photoresist composition comprising cyclohexyleneoxyalkyl acrylates
Mcconkey, Robert C. (Rochester, NY)
Molaire, Michel F. (Rochester, NY)
Noonan, John M. (Rochester, NY)
A flexible and nonbrittle negative-working photoresist composition comprises a polymeric binder, a photoinitiator composition, and a polymerizable cyclohexyleneoxyalkyl acrylate monomer characterized by the structural formula: ##STR1## wherein R is H or CH3,
a is an integer of from 1 to 10 and
b is 1 or 2.